Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response
📝 Original Info
- Title: Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response
- ArXiv ID: 0711.3321
- Date: 2007-11-29
- Authors: ** 논문에 명시된 저자 정보가 제공되지 않았습니다. (원문에 저자 명단이 누락되어 있음) **
📝 Abstract
This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted beyond one third of the initial gap and even be eliminated when electrostatic actuators are operated in liquids. This should benefit to applications in microfluidics requiring either binary state actuation (e.g. pumps, valves) or continuous displacements over the whole gap (e.g. microtweezers). In dynamic mode, actuators like micro-cantilevers present a great interest for Atomic Force Microscopy (AFM) in liquids. As this application requires a good understanding of the cantilever resonance frequency and Q-factor, an analytical modeling in liquid environment has been established. The theoretically derived curves are validated by experimental results using a nitride encapsulated cantilever with integrated electrostatic actuation. Electrode potential screening and undesirable electrochemistry in dielectric liquids are counteracted using AC-voltages. Both experimental and theoretical results should prove useful in micro-cantilever design for AFM in liquids.💡 Deep Analysis
📄 Full Content
Reference
This content is AI-processed based on open access ArXiv data.